Vol. 2012, Issue CICMT, 2012September 01, 2012 EDT
Micro Fluidic Mass Flow Sensor Concept for Functional Ceramic Circuits
Micro Fluidic Mass Flow Sensor Concept for Functional Ceramic Circuits
C. Zeilmann, T. Haas, A. Backes, U. Schmid,
Zeilmann, C., T. Haas, A. Backes, and U. Schmid. 2012. “Micro Fluidic Mass Flow Sensor Concept for Functional Ceramic Circuits.” IMAPSource Proceedings 2012 (CICMT): 181–90. https://doi.org/10.4071/CICMT-2012-TP44.