Heterogeneous Integration and Micromachining Technologies for Terahertz Devices and Components

Robert M. Weikle; N. Scott Barker; Arthur W. Lichtenberger; Matthew F. Bauwens; Naser Alijabbari

doi:10.4071/2015DPC-tha31

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Weikle, Robert M., N. Scott Barker, Arthur W. Lichtenberger, Matthew F. Bauwens, and Naser Alijabbari. 2015. “Heterogeneous Integration and Micromachining Technologies for Terahertz Devices and Components.” IMAPSource Proceedings 2015 (DPC): 2041–81. https://doi.org/10.4071/2015DPC-tha31.

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