ISSN 2380-4505
Vol. 2016, Issue CICMT, 2016May 01, 2016 EDT
Fabrication of an RF-MEMS-Switch on a hybrid Si-Ceramic substrate
Fabrication of an RF-MEMS-Switch on a hybrid Si-Ceramic substrate
S. Gropp, M. Fischer, A. Frank, C. Schäffel, J. Müller, M. Hoffmann,
Gropp, S., M. Fischer, A. Frank, C. Schäffel, J. Müller, and M. Hoffmann. 2016. “Fabrication of an RF-MEMS-Switch on a Hybrid Si-Ceramic Substrate.” IMAPSource Proceedings 2016 (CICMT): 118–21. https://doi.org/10.4071/2016CICMT-WA24.