Vol. 2013, Issue CICMT, 2013September 01, 2013 EDT
Multifunctional LTCC Substrates for Thermal Actuation of Tunable Micro-Lenses Made of Aluminum Nitride Membranes
Multifunctional LTCC Substrates for Thermal Actuation of Tunable Micro-Lenses Made of Aluminum Nitride Membranes
S. Leopold, T. Geiling, C. Fliegner, D. Pätz, S. Sinzinger, J. Müller, M. Hoffmann,
Leopold, S., T. Geiling, C. Fliegner, D. Pätz, S. Sinzinger, J. Müller, and M. Hoffmann. 2013. “Multifunctional LTCC Substrates for Thermal Actuation of Tunable Micro-Lenses Made of Aluminum Nitride Membranes.” IMAPSource Proceedings 2013 (CICMT): 124–30. https://doi.org/10.4071/CICMT-2013-WP14.