Advances in Parylene Adhesive Bonding for the Realization of Biocompatible Microsystems

Franz Selbmann; Frank Roscher; Maik Wiemer; Harald Kuhn; Yvonne Joseph

doi:10.4071/001c.94829

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Selbmann, Franz, Frank Roscher, Maik Wiemer, Harald Kuhn, and Yvonne Joseph. 2024. “Advances in Parylene Adhesive Bonding for the Realization of Biocompatible Microsystems.” IMAPSource Proceedings 2023 (EMPC): 334–39. https://doi.org/10.4071/001c.94829.

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