MEMS Mirror in Hermetic Package for Enhanced Performances

Luca Maggi; Marco Del Sarto; Amedeo Maierna; Mark Shaw; Roberto Carminati; Gianluca Mendicino; Davide Rotta; Marco Chiesa; Aina Serrano Rodrigo; Antonella Bogoni

doi:10.4071/001c.94764

Maggi, Luca, Marco Del Sarto, Amedeo Maierna, Mark Shaw, Roberto Carminati, Gianluca Mendicino, Davide Rotta, Marco Chiesa, Aina Serrano Rodrigo, and Antonella Bogoni. 2024. “MEMS Mirror in Hermetic Package for Enhanced Performances.” IMAPSource Proceedings 2023 (EMPC): 251–55. https://doi.org/10.4071/001c.94764.

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MEMS Mirror in Hermetic Package for Enhanced Performances

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