Vol. 2023, Issue EMPC, 2023March 06, 2024 EDT
Innovative Silicon-Ceramic (SiCer) Technology for High-Strength Pressure Sensor Applications Using Different Manufacturing Methods
Innovative Silicon-Ceramic (SiCer) Technology for High-Strength Pressure Sensor Applications Using Different Manufacturing Methods
Kleinholz, Cathleen, Michael Fischer, Nam Gutzeit, Andrea Cyriax, Michael Hintz, Thomas Ortlepp, and Jens Müller. 2024. “Innovative Silicon-Ceramic (SiCer) Technology for High-Strength Pressure Sensor Applications Using Different Manufacturing Methods.” IMAPSource Proceedings 2023 (EMPC): 189–94. https://doi.org/10.4071/001c.94748.