Vol. 2023, Issue EMPC, 2023March 06, 2024 EDT
Innovative Silicon-Ceramic (SiCer) Technology for High-Strength Pressure Sensor Applications Using Different Manufacturing Methods
Innovative Silicon-Ceramic (SiCer) Technology for High-Strength Pressure Sensor Applications Using Different Manufacturing Methods
Cathleen Kleinholz, Michael Fischer, Nam Gutzeit, Andrea Cyriax, Michael Hintz, Thomas Ortlepp, Jens Müller,
Kleinholz, Cathleen, Michael Fischer, Nam Gutzeit, Andrea Cyriax, Michael Hintz, Thomas Ortlepp, and Jens Müller. 2024. “Innovative Silicon-Ceramic (SiCer) Technology for High-Strength Pressure Sensor Applications Using Different Manufacturing Methods.” IMAPSource Proceedings 2023 (EMPC): 189–94. https://doi.org/10.4071/001c.94748.