Vol. 2023, Issue Symposium, 2023February 29, 2024 EDT
Trusted Data Acquisition in Microelectronics Manufacturing as a Basis for ML-Optimized Processing
Trusted Data Acquisition in Microelectronics Manufacturing as a Basis for ML-Optimized Processing
K. F. Becker, S. Voges, P. Fruehauf, M. Heimann, S. Nerreter, R. Blank, M. Erdmann, S. Gottwald, A. Hofmeister, P. Lopuszanski, M. Hesse, M. Thies, S. Mehrafsun, R. Fust, E. Beck, M. Becicka, J. Pawlikowski, B. Schroeder, C. Voigt, T. Braun, M. Schneider-Ramelow,
Becker, K. F., S. Voges, P. Fruehauf, M. Heimann, S. Nerreter, R. Blank, M. Erdmann, et al. 2024. “Trusted Data Acquisition in Microelectronics Manufacturing as a Basis for ML-Optimized Processing.” IMAPSource Proceedings 2023 (Symposium): 239–47. https://doi.org/10.4071/001c.94507.