Stress Analysis and Optimization on Saddle-shape Warpage by Direct Patterning of Stressed Film

Kang, Sujie, Min Soo Han, Jung Shin Lee, Kyeongbin Lim, Bumki Moon, and Daniel Minwoo Rhee. 2024. “Stress Analysis and Optimization on Saddle-Shape Warpage by Direct Patterning of Stressed Film.” IMAPSource Proceedings 2023 (Symposium): 211–15. https:/​/​doi.org/​10.4071/​001c.94497.