Stress Analysis and Optimization on Saddle-shape Warpage by Direct Patterning of Stressed Film

Sujie Kang; Min Soo Han; Jung Shin Lee; Kyeongbin Lim; Bumki Moon; Daniel Minwoo Rhee

doi:10.4071/001c.94497

Loading [Contrib]/a11y/accessibility-menu.js

Kang, Sujie, Min Soo Han, Jung Shin Lee, Kyeongbin Lim, Bumki Moon, and Daniel Minwoo Rhee. 2024. “Stress Analysis and Optimization on Saddle-Shape Warpage by Direct Patterning of Stressed Film.” IMAPSource Proceedings 2023 (Symposium): 211–15. https://doi.org/10.4071/001c.94497.

View more stats