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ISSN 2380-4505
Symposium Proceedings
Vol. 2023, Issue Symposium, 2023February 29, 2024 EDT

Next Level of 1/1 μm Line and Space Copper Redistribution Layer Fabrication with Organic Dielectric Materials

Yu Shoji, Takuma Nishimura, Hisashi Ogasawara, Keika Hashimoto, Yuki Masuda, Hitoshi Araki, Masao Tomikawa,
Electrical reliabilityfine copper wiringslow temperature curablephotosensitive polyimidesredistribution layers
https://doi.org/10.4071/001c.94492
IMAPSource Conference Papers
Shoji, Yu, Takuma Nishimura, Hisashi Ogasawara, Keika Hashimoto, Yuki Masuda, Hitoshi Araki, and Masao Tomikawa. 2024. “Next Level of 1/1 Μm Line and Space Copper Redistribution Layer Fabrication with Organic Dielectric Materials.” IMAPSource Proceedings 2023 (Symposium): 190–94. https:/​/​doi.org/​10.4071/​001c.94492.

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