Characterization of a UV-USP Laser Grooving Process Combined with Plasma Dicing to Support Next Generation Advanced Packaging Trends

Evertsen, Rogier, Janet Hopkins, Oliver Ansell, Samira Kazemi, Roland Mumford, Richard Barnett, Kees Biesheuvel, and Jeroen van Borkulo. 2024. “Characterization of a UV-USP Laser Grooving Process Combined with Plasma Dicing to Support Next Generation Advanced Packaging Trends.” IMAPSource Proceedings 2023 (Symposium): 184–89. https:/​/​doi.org/​10.4071/​001c.94490.