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Symposium Proceedings
Vol. 2023, Issue Symposium, 2023February 29, 2024 EDT

Optimized Die Preparation and Handling for High Yield Hybrid Die to Wafer Bonding

Pieter Bex, Alain Phommahaxay, Koen Kennes, Samuel Suhard, Steven Brems, Eric Beyne,
Carrier systemHybrid bondingInterconnectsPick and placeThin die
https://doi.org/10.4071/001c.94483
IMAPSource Conference Papers
Bex, Pieter, Alain Phommahaxay, Koen Kennes, Samuel Suhard, Steven Brems, and Eric Beyne. 2024. “Optimized Die Preparation and Handling for High Yield Hybrid Die to Wafer Bonding.” IMAPSource Proceedings 2023 (Symposium): 151–57. https:/​/​doi.org/​10.4071/​001c.94483.
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