Hermetic Package for MEMS Mirror

Rotta, Davide, Marco Chiesa, Aina Serrano, Marco Del Sarto, Luca Maggi, Amedeo Maierna, and Antonella Bogoni. 2023. “Hermetic Package for MEMS Mirror.” IMAPSource Proceedings 2023 (DPC): 1019–36. https:/​/​doi.org/​10.4071/​001c.90733.