Hermetic Package for MEMS Mirror

Davide Rotta; Marco Chiesa; Aina Serrano; Marco Del Sarto; Luca Maggi; Amedeo Maierna; Antonella Bogoni

doi:10.4071/001c.90733

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Rotta, Davide, Marco Chiesa, Aina Serrano, Marco Del Sarto, Luca Maggi, Amedeo Maierna, and Antonella Bogoni. 2023. “Hermetic Package for MEMS Mirror.” IMAPSource Proceedings 2023 (DPC): 1019–36. https://doi.org/10.4071/001c.90733.

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