Novel IR Laser Debonding for Heterogeneous and 3D Integration

Uhrmann, Thomas, Peter Urban, Markus Wimplinger, Boris Povazay, Julian Bravin, and Bernd Thallner. 2023. “Novel IR Laser Debonding for Heterogeneous and 3D Integration.” IMAPSource Proceedings 2023 (DPC): 354–76. https:/​/​doi.org/​10.4071/​001c.90230.