Optimization of the Copper Microstructure to Improve Copper-to-Copper Direct Bonding

Ralf Schmidt; Christian Schwarz; Erkin Tamer; Sascha Dieter

doi:10.4071/001c.74772

Schmidt, Ralf, Christian Schwarz, Erkin Tamer, and Sascha Dieter. 2023. “Optimization of the Copper Microstructure to Improve Copper-to-Copper Direct Bonding.” IMAPSource Proceedings 2022 (IMAPS Symposium): 000280–86. https://doi.org/10.4071/001c.74772.

View more stats

Optimization of the Copper Microstructure to Improve Copper-to-Copper Direct Bonding

This website uses cookies