Optimization of the Copper Microstructure to Improve Copper-to-Copper Direct Bonding

Ralf Schmidt; Christian Schwarz; Erkin Tamer; Sascha Dieter

doi:10.4071/001c.74772

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Schmidt, Ralf, Christian Schwarz, Erkin Tamer, and Sascha Dieter. 2023. “Optimization of the Copper Microstructure to Improve Copper-to-Copper Direct Bonding.” IMAPSource Proceedings 2022 (1): 000280–86. https://doi.org/10.4071/001c.74772.

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