Vol. 2022, Issue IMAPS Symposium, 2022May 01, 2023 EDT
A high-uniformity, high-purity copper pillar ECP process with limited acid concentration
A high-uniformity, high-purity copper pillar ECP process with limited acid concentration
Pingping Ye, Adam Letize, Jianwen Han, Stephan Braye, Ashley Kuppersmith, Kyle Whitten, Thomas Richardson, Elie Najjar,
Ye, Pingping, Adam Letize, Jianwen Han, Stephan Braye, Ashley Kuppersmith, Kyle Whitten, Thomas Richardson, and Elie Najjar. 2023. “A High-Uniformity, High-Purity Copper Pillar ECP Process with Limited Acid Concentration.” IMAPSource Proceedings 2022 (IMAPS Symposium): 000187–91. https://doi.org/10.4071/001c.74736.