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Symposium Proceedings
Vol. 2022, Issue IMAPS Symposium, 2022May 01, 2023 EDT

An Evaluation of Bath Life Effects on Photoresist Removal for Wafer Level Packaging

Joel A. Bahena, Phillip Tyler, John Taddei, Muthumanickam Sankarapandian, Jamie Prudhomme, Karthikeyan Pillai, Abdullahi Said, Christopher Carr, Dario Goldfarb, Chris Waskiewicz, Qianwen Chen,
Negative tone photoresistbath lifephotoresist removalwafer level packagingsingle wafer processing
https://doi.org/10.4071/001c.74626
IMAPSource Conference Papers
Bahena, Joel A., Phillip Tyler, John Taddei, Muthumanickam Sankarapandian, Jamie Prudhomme, Karthikeyan Pillai, Abdullahi Said, et al. 2023. “An Evaluation of Bath Life Effects on Photoresist Removal for Wafer Level Packaging.” IMAPSource Proceedings 2022 (IMAPS Symposium): 000105–10. https:/​/​doi.org/​10.4071/​001c.74626.
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