A novel hybrid method to integrate delicate MEMS components into a FOWLP

Tanja Braun; Marc Dreissigacker; Markus Wöhrmann; Karl-Friedrich Becker; Martin Schneider-Ramelow

doi:10.4071/001c.74606

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Braun, Tanja, Marc Dreissigacker, Markus Wöhrmann, Karl-Friedrich Becker, and Martin Schneider-Ramelow. 2023. “A Novel Hybrid Method to Integrate Delicate MEMS Components into a FOWLP.” IMAPSource Proceedings 2022 (1): 000056–000061. https://doi.org/10.4071/001c.74606.

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