FEA Assisted Optimization of Bump Shear Test Method for Assessment of Back-End-of-Line Mechanical Integrity

Moon Soo Lee; Min Kim; Sungwon Jung; A-ram Kang; Myeong-soo Yeo; Shinyoung Chung; Eun-cheol Lee

doi:10.4071/001c.74599

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Lee, Moon Soo, Min Kim, Sungwon Jung, A-ram Kang, Myeong-soo Yeo, Shinyoung Chung, and Eun-cheol Lee. 2023. “FEA Assisted Optimization of Bump Shear Test Method for Assessment of Back-End-of-Line Mechanical Integrity.” IMAPSource Proceedings 2022 (1): 000023–000031. https://doi.org/10.4071/001c.74599.

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