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Symposium Proceedings
Vol. 2022, Issue 1, 2022May 01, 2023 EDT

FEA Assisted Optimization of Bump Shear Test Method for Assessment of Back-End-of-Line Mechanical Integrity

Moon Soo Lee, Min Kim, Sungwon Jung, A-ram Kang, Myeong-soo Yeo, Shinyoung Chung, Eun-cheol Lee,
Bump shear test CPI FEA machine learning ULK
• https://doi.org/10.4071/001c.74599
IMAPSource Conference Papers
Lee, Moon Soo, Min Kim, Sungwon Jung, A-ram Kang, Myeong-soo Yeo, Shinyoung Chung, and Eun-cheol Lee. 2023. “FEA Assisted Optimization of Bump Shear Test Method for Assessment of Back-End-of-Line Mechanical Integrity.” IMAPSource Proceedings 2022 (1): 000023–000031. https://doi.org/10.4071/001c.74599.
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