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Symposium Proceedings
Vol. 2022, Issue IMAPS Symposium, 2022May 01, 2023 EDT

Fabrication of Panel-Level Glass Substrates with Complete Design Freedom using LIDE

Rafael Santos, Nils Anspach, Norbert Ambrosius, Stephan Schmidt, Roman Ostholt,
GlassInterposerPanel-LevelTGVThrough Glass ViaWafer-Level
https://doi.org/10.4071/001c.74577
IMAPSource Conference Papers
Santos, Rafael, Nils Anspach, Norbert Ambrosius, Stephan Schmidt, and Roman Ostholt. 2023. “Fabrication of Panel-Level Glass Substrates with Complete Design Freedom Using LIDE.” IMAPSource Proceedings 2022 (IMAPS Symposium): 000371–77. https:/​/​doi.org/​10.4071/​001c.74577.
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