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Vol. 2021, Issue IMAPS Symposium, 2021October 01, 2021 EDT

Structured glass substrates in wafer- and panel level packaging: Status and recent achievements.

M. Letz, T. Gotschke, F. Wagner, M. Heiss-Chouquet, L. Müller, U. Peuchert, D. Vanderpool,
Glass interposerglass packagingheterogeneous integrationpanel level packagingthrough glass viawafer level packaging
https://doi.org/10.4071/1085-8024-2021.1.000098
IMAPSource Conference Papers
Letz, M., T. Gotschke, F. Wagner, M. Heiss-Chouquet, L. Müller, U. Peuchert, and D. Vanderpool. 2021. “Structured Glass Substrates in Wafer- and Panel Level Packaging: Status and Recent Achievements.” IMAPSource Proceedings 2021 (IMAPS Symposium): 98–102. https:/​/​doi.org/​10.4071/​1085-8024-2021.1.000098.
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