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Vol. 2021, Issue IMAPS Symposium, 2021October 01, 2021 EDT

Fine Line and Low Stress RDL Solition for Fan-Out Wafer Level & Panel Level Packaging

Yoshinori Matsuura, Tatsuya Yoshida, Yukiko Komiya, Toshimi Nakamura, Takenori Yanai, Kazuhiro Okuyama, Yukiko Kitabatake, Rintaro Ishii, Katsuyuki Hayashi, Takashi Kubota, Joji Fujii,
Carrier technologyHRDP® (High Resolution Debondable Panel)Mechanical debondLine/Space (L/S)Chip LastRDLFan-Out Wafer Level (FO-WLP)Panel Level Package (PLP)Coefficient of thermal expansion (CTE)
https://doi.org/10.4071/1085-8024-2021.1.000039
IMAPSource Conference Papers
Matsuura, Yoshinori, Tatsuya Yoshida, Yukiko Komiya, Toshimi Nakamura, Takenori Yanai, Kazuhiro Okuyama, Yukiko Kitabatake, et al. 2021. “Fine Line and Low Stress RDL Solition for Fan-Out Wafer Level & Panel Level Packaging.” IMAPSource Proceedings 2021 (IMAPS Symposium): 39–44. https:/​/​doi.org/​10.4071/​1085-8024-2021.1.000039.
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