Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments

K.-F. Becker; S. Voges; P. Fruehauf; M. Heimann; S. Nerreter; R. Blank; M. Erdmann; S. Gottwald; A. Hofmeister; M. Hesse; M. Thies; S. Mehrafsun; R. Fust; E. Beck; J. Pawlikowski; B. Schröder; C. Voight; T. Braun; M. Schneider-Ramelow

doi:10.4071/1085-8024-2021.1

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General

Vol. 2021, Issue 1, 2021

October 01, 2021 EDT

Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments

K.-F. Becker, S. Voges, P. Fruehauf, M. Heimann, S. Nerreter, R. Blank, M. Erdmann, S. Gottwald, A. Hofmeister, M. Hesse, M. Thies, S. Mehrafsun, R. Fust, E. Beck, J. Pawlikowski, B. Schröder, C. Voight, T. Braun, M. Schneider-Ramelow,

Industry 4.0 smart manufacturing sensor networks Chain of Trust

• https://doi.org/10.4071/1085-8024-2021.1

IMAPSource Conference Papers

Becker, K.-F., S. Voges, P. Fruehauf, M. Heimann, S. Nerreter, R. Blank, M. Erdmann, et al. 2021. “Implementation of Trusted Manufacturing & AI-Based Process Optimization into Microelectronic Manufacturing Research Environments.” IMAPSource Proceedings 2021 (1): 21–25. https://doi.org/10.4071/1085-8024-2021.1.

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