Vol. 2021, Issue IMAPS Symposium, 2021October 01, 2021 EDT
Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments
Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments
K.-F. Becker, S. Voges, P. Fruehauf, M. Heimann, S. Nerreter, R. Blank, M. Erdmann, S. Gottwald, A. Hofmeister, M. Hesse, M. Thies, S. Mehrafsun, R. Fust, E. Beck, J. Pawlikowski, B. Schröder, C. Voight, T. Braun, M. Schneider-Ramelow,
Becker, K.-F., S. Voges, P. Fruehauf, M. Heimann, S. Nerreter, R. Blank, M. Erdmann, et al. 2021. “Implementation of Trusted Manufacturing & AI-Based Process Optimization into Microelectronic Manufacturing Research Environments.” IMAPSource Proceedings 2021 (IMAPS Symposium): 21–25. https://doi.org/10.4071/1085-8024-2021.1.