MEMS Fabrication on LTCC Substrates for RF Applications: Challenges and Perspectives

Dorra Bahloul; Achraf Ben Amar; Ammar B. Kouki

doi:10.4071/2016CICMT-WA13

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Bahloul, Dorra, Achraf Ben Amar, and Ammar B. Kouki. 2016. “MEMS Fabrication on LTCC Substrates for RF Applications: Challenges and Perspectives.” IMAPSource Proceedings 2016 (CICMT): 89–94. https://doi.org/10.4071/2016CICMT-WA13.

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