Vol. 2016, Issue CICMT, 2016May 01, 2016 EDT
MEMS Fabrication on LTCC Substrates for RF Applications: Challenges and Perspectives
MEMS Fabrication on LTCC Substrates for RF Applications: Challenges and Perspectives
Dorra Bahloul, Achraf Ben Amar, Ammar B. Kouki,
Bahloul, Dorra, Achraf Ben Amar, and Ammar B. Kouki. 2016. “MEMS Fabrication on LTCC Substrates for RF Applications: Challenges and Perspectives.” IMAPSource Proceedings 2016 (CICMT): 89–94. https://doi.org/10.4071/2016CICMT-WA13.