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Ceramics Conference Papers
Vol. 2016, Issue CICMT, 2016
May 01, 2016 EDT
MEMS Fabrication on LTCC Substrates for RF Applications: Challenges and Perspectives
Dorra Bahloul
,
Achraf Ben Amar
,
Ammar B. Kouki
,
MEMS
LTCC
CMP
roughness
•
https://doi.org/10.4071/2016CICMT-WA13
IMAPSource Conference Papers
Bahloul, Dorra, Achraf Ben Amar, and Ammar B. Kouki. 2016. “MEMS Fabrication on LTCC Substrates for RF Applications: Challenges and Perspectives.”
IMAPSource Proceedings
2016 (CICMT): 89–94.
https://doi.org/10.4071/2016CICMT-WA13
.
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