Vol. 2016, Issue CICMT, 2016May 01, 2016 EDT
Fabrication, response and stability of miniature piezoresistive force-sensing thick-film cantilevers
Fabrication, response and stability of miniature piezoresistive force-sensing thick-film cantilevers
Thomas Maeder, Caroline Jacq, Stefane Caseiro, Peter Ryser,
Maeder, Thomas, Caroline Jacq, Stefane Caseiro, and Peter Ryser. 2016. “Fabrication, Response and Stability of Miniature Piezoresistive Force-Sensing Thick-Film Cantilevers.” IMAPSource Proceedings 2016 (CICMT): 24–31. https://doi.org/10.4071/2016CICMT-TP1A3.