Fabrication of an RF-MEMS-Switch on a hybrid Si-Ceramic substrate

S. Gropp; M. Fischer; A. Frank; C. Schäffel; J. Müller; M. Hoffmann

doi:10.4071/2016CICMT-WA24

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Gropp, S., M. Fischer, A. Frank, C. Schäffel, J. Müller, and M. Hoffmann. 2016. “Fabrication of an RF-MEMS-Switch on a Hybrid Si-Ceramic Substrate.” IMAPSource Proceedings 2016 (CICMT): 118–21. https://doi.org/10.4071/2016CICMT-WA24.

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