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Ceramics Conference Papers
Vol. 2016, Issue CICMT, 2016
May 01, 2016 EDT
Fabrication of an RF-MEMS-Switch on a hybrid Si-Ceramic substrate
S. Gropp
,
M. Fischer
,
A. Frank
,
C. Schäffel
,
J. Müller
,
M. Hoffmann
,
SiCer
Silicon-On-Ceramics
LTCC
sintering process
buried cavities
RF-MEMS-switch
•
https://doi.org/10.4071/2016CICMT-WA24
IMAPSource Conference Papers
Gropp, S., M. Fischer, A. Frank, C. Schäffel, J. Müller, and M. Hoffmann. 2016. “Fabrication of an RF-MEMS-Switch on a Hybrid Si-Ceramic Substrate.”
IMAPSource Proceedings
2016 (CICMT): 118–21.
https://doi.org/10.4071/2016CICMT-WA24
.
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