Vol. 2010, Issue DPC, 2010January 01, 2010 EDT
PCBMEMS as a Flexible Path to Devices and Systems across Spatial Scales
PCBMEMS as a Flexible Path to Devices and Systems across Spatial Scales
David P. Fries, Stanislav Z. Ivanov, Heather Broadbent, Matthew Smith, George Steimle, Ross Willoughby,
Fries, David P., Stanislav Z. Ivanov, Heather Broadbent, Matthew Smith, George Steimle, and Ross Willoughby. 2010. “PCBMEMS as a Flexible Path to Devices and Systems across Spatial Scales.” IMAPSource Proceedings 2010 (DPC): 599–642. https://doi.org/10.4071/2010DPC-ta23.