Vol. 2010, Issue DPC, 2010January 01, 2010 EDT
A Robust Wafer-Level Capping Approach for MEMS Devices
A Robust Wafer-Level Capping Approach for MEMS Devices
Krishnan Seetharaman, Bart van Velzen, Hans van Zadelhoff, Cadmus Yuan, Frank Rietveld, Coen Tak, Joost van Beek, Jan-Jaap Koning, Peter H. C. Magnée, Johannes van Wingerden, Herman C. W. Beijerinck,
Seetharaman, Krishnan, Bart van Velzen, Hans van Zadelhoff, Cadmus Yuan, Frank Rietveld, Coen Tak, Joost van Beek, et al. 2010. “A Robust Wafer-Level Capping Approach for MEMS Devices.” IMAPSource Proceedings 2010 (DPC): 891–924. https://doi.org/10.4071/2010DPC-tp21.