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Device Packaging Conference Presentations
Vol. 2010, Issue DPC, 2010January 01, 2010 EDT

Novel Polymeric Protective Coatings for Hydrofluoric Acid Vapor Etching during MEMS Release Etch

Tingji Tang, Curt Planje, Ramachandran K. Trichur, Xing-Fu Zhong, Shelly Fowler, Gu Xu, Kimberly Yess, Xie Shao, Daniel J. Vestyck,
MEMS releaseVapor HFProtective coating
https://doi.org/10.4071/2010DPC-tp24
IMAPSource Conference Papers
Tang, Tingji, Curt Planje, Ramachandran K. Trichur, Xing-Fu Zhong, Shelly Fowler, Gu Xu, Kimberly Yess, Xie Shao, and Daniel J. Vestyck. 2010. “Novel Polymeric Protective Coatings for Hydrofluoric Acid Vapor Etching during MEMS Release Etch.” IMAPSource Proceedings 2010 (DPC): 942–70. https:/​/​doi.org/​10.4071/​2010DPC-tp24.
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