Novel Polymeric Protective Coatings for Hydrofluoric Acid Vapor Etching during MEMS Release Etch

Tingji Tang; Curt Planje; Ramachandran K. Trichur; Xing-Fu Zhong; Shelly Fowler; Gu Xu; Kimberly Yess; Xie Shao; Daniel J. Vestyck

doi:10.4071/2010DPC-tp24

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Tang, Tingji, Curt Planje, Ramachandran K. Trichur, Xing-Fu Zhong, Shelly Fowler, Gu Xu, Kimberly Yess, Xie Shao, and Daniel J. Vestyck. 2010. “Novel Polymeric Protective Coatings for Hydrofluoric Acid Vapor Etching during MEMS Release Etch.” IMAPSource Proceedings 2010 (DPC): 942–70. https://doi.org/10.4071/2010DPC-tp24.

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