Vol. 2010, Issue DPC, 2010January 01, 2010 EDT
Novel Polymeric Protective Coatings for Hydrofluoric Acid Vapor Etching during MEMS Release Etch
Novel Polymeric Protective Coatings for Hydrofluoric Acid Vapor Etching during MEMS Release Etch
Tingji Tang, Curt Planje, Ramachandran K. Trichur, Xing-Fu Zhong, Shelly Fowler, Gu Xu, Kimberly Yess, Xie Shao, Daniel J. Vestyck,
Tang, Tingji, Curt Planje, Ramachandran K. Trichur, Xing-Fu Zhong, Shelly Fowler, Gu Xu, Kimberly Yess, Xie Shao, and Daniel J. Vestyck. 2010. “Novel Polymeric Protective Coatings for Hydrofluoric Acid Vapor Etching during MEMS Release Etch.” IMAPSource Proceedings 2010 (DPC): 942–70. https://doi.org/10.4071/2010DPC-tp24.