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Device Packaging Conference Presentations
Vol. 2010, Issue DPC, 2010
January 01, 2010 EDT
Integration of Electroactive Polymers in MEMS Ultrasonic Sensors
Michael Kranz
,
Michael Whitley
,
Sharon Sanchez
,
Michael Allen
,
Electroactive Polymer
Ultrasonic
Electret
•
https://doi.org/10.4071/2010DPC-ta24
IMAPSource Conference Papers
Kranz, Michael, Michael Whitley, Sharon Sanchez, and Michael Allen. 2010. “Integration of Electroactive Polymers in MEMS Ultrasonic Sensors.”
IMAPSource Proceedings
2010 (DPC): 643–70.
https://doi.org/10.4071/2010DPC-ta24
.
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