Integration of Electroactive Polymers in MEMS Ultrasonic Sensors

Michael Kranz; Michael Whitley; Sharon Sanchez; Michael Allen

doi:10.4071/2010DPC-ta24

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Kranz, Michael, Michael Whitley, Sharon Sanchez, and Michael Allen. 2010. “Integration of Electroactive Polymers in MEMS Ultrasonic Sensors.” IMAPSource Proceedings 2010 (DPC): 643–70. https://doi.org/10.4071/2010DPC-ta24.

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