Vol. 2014, Issue HITEC, 2014January 01, 2014 EDT
High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride
High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride
Benjamin A. Griffin, Scott D. Habermehl, Peggy J. Clews,
Griffin, Benjamin A., Scott D. Habermehl, and Peggy J. Clews. 2014. “High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.” IMAPSource Proceedings 2014 (HITEC): 40–46. https://doi.org/10.4071/HITEC-TA24.