Glass Carrier Wafers for the Si Thinning Process for Stack IC Applications

Aric Shorey; Bor-Kai Wang; Joe Canale; Windsor Thomas

doi:10.4071/2013DPC-wa11

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Shorey, Aric, Bor-Kai Wang, Joe Canale, and Windsor Thomas. 2013. “Glass Carrier Wafers for the Si Thinning Process for Stack IC Applications.” IMAPSource Proceedings 2013 (DPC): 989–1008. https://doi.org/10.4071/2013DPC-wa11.

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