Vol. 2013, Issue DPC, 2013January 01, 2013 EDT
Glass Carrier Wafers for the Si Thinning Process for Stack IC Applications
Glass Carrier Wafers for the Si Thinning Process for Stack IC Applications
Aric Shorey, Bor-Kai Wang, Joe Canale, Windsor Thomas,
Shorey, Aric, Bor-Kai Wang, Joe Canale, and Windsor Thomas. 2013. “Glass Carrier Wafers for the Si Thinning Process for Stack IC Applications.” IMAPSource Proceedings 2013 (DPC): 989–1008. https://doi.org/10.4071/2013DPC-wa11.