Frederic, Souchon, Gervais Anne-Charlotte, Thouy Laurent, Saint-Patrice Damien, and Pornin Jean louis. 2013. “A Design Tool Fully Adapted to the Development of the Thin Film Packaging Process Used for MEMS Devices.” IMAPSource Proceedings 2013 (DPC): 937–86. https://doi.org/10.4071/2013DPC-tp35.