Vol. 2013, Issue DPC, 2013January 01, 2013 EDT
A design tool fully adapted to the development of the thin film packaging process used for MEMS devices
A design tool fully adapted to the development of the thin film packaging process used for MEMS devices
Frederic, Souchon, Gervais Anne-Charlotte, Thouy Laurent, Saint-Patrice Damien, and Pornin Jean louis. 2013. “A Design Tool Fully Adapted to the Development of the Thin Film Packaging Process Used for MEMS Devices.” IMAPSource Proceedings 2013 (DPC): 937–86. https://doi.org/10.4071/2013DPC-tp35.
Powered by Scholastica, the modern academic journal management system