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Device Packaging Conference Presentations
Vol. 2013, Issue DPC, 2013January 01, 2013 EDT

A design tool fully adapted to the development of the thin film packaging process used for MEMS devices

Souchon Frederic, Gervais Anne-Charlotte, Thouy Laurent, Saint-Patrice Damien, Pornin Jean louis,
Thin film packagingModelingReinforcement
https://doi.org/10.4071/2013DPC-tp35
IMAPSource Conference Papers
Frederic, Souchon, Gervais Anne-Charlotte, Thouy Laurent, Saint-Patrice Damien, and Pornin Jean louis. 2013. “A Design Tool Fully Adapted to the Development of the Thin Film Packaging Process Used for MEMS Devices.” IMAPSource Proceedings 2013 (DPC): 937–86. https:/​/​doi.org/​10.4071/​2013DPC-tp35.
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