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Ceramics Conference Papers
Vol. 2012, Issue CICMT, 2012September 01, 2012 EDT

Gas Sensors Based on Ceramic MEMS Structures Made of Anodic Alumina and Yttria Stabilized Zirconia Films

A.A. Vasiliev, A.S. Lipilin, A.M. Mozalev, A.S. Lagutin, A.V. Pisliakov, N.P. Zaretskiy, N.N. Samotaev, A.V. Sokolov, S.A. Soloviev,
Gas SensorsHarsh ApplicationsMEMS PlatformsZirconium DioxideAluminum Oxide
https://doi.org/10.4071/CICMT-2012-WP33
IMAPSource Conference Papers
Vasiliev, A.A., A.S. Lipilin, A.M. Mozalev, A.S. Lagutin, A.V. Pisliakov, N.P. Zaretskiy, N.N. Samotaev, A.V. Sokolov, and S.A. Soloviev. 2012. “Gas Sensors Based on Ceramic MEMS Structures Made of Anodic Alumina and Yttria Stabilized Zirconia Films.” IMAPSource Proceedings 2012 (CICMT): 528–34. https:/​/​doi.org/​10.4071/​CICMT-2012-WP33.
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