Vol. 2012, Issue CICMT, 2012September 01, 2012 EDT
Gas Sensors Based on Ceramic MEMS Structures Made of Anodic Alumina and Yttria Stabilized Zirconia Films
Gas Sensors Based on Ceramic MEMS Structures Made of Anodic Alumina and Yttria Stabilized Zirconia Films
A.A. Vasiliev, A.S. Lipilin, A.M. Mozalev, A.S. Lagutin, A.V. Pisliakov, N.P. Zaretskiy, N.N. Samotaev, A.V. Sokolov, S.A. Soloviev,
Vasiliev, A.A., A.S. Lipilin, A.M. Mozalev, A.S. Lagutin, A.V. Pisliakov, N.P. Zaretskiy, N.N. Samotaev, A.V. Sokolov, and S.A. Soloviev. 2012. “Gas Sensors Based on Ceramic MEMS Structures Made of Anodic Alumina and Yttria Stabilized Zirconia Films.” IMAPSource Proceedings 2012 (CICMT): 528–34. https://doi.org/10.4071/CICMT-2012-WP33.