Gas Sensors Based on Ceramic MEMS Structures Made of Anodic Alumina and Yttria Stabilized Zirconia Films

A.A. Vasiliev; A.S. Lipilin; A.M. Mozalev; A.S. Lagutin; A.V. Pisliakov; N.P. Zaretskiy; N.N. Samotaev; A.V. Sokolov; S.A. Soloviev

doi:10.4071/CICMT-2012-WP33

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Vasiliev, A.A., A.S. Lipilin, A.M. Mozalev, A.S. Lagutin, A.V. Pisliakov, N.P. Zaretskiy, N.N. Samotaev, A.V. Sokolov, and S.A. Soloviev. 2012. “Gas Sensors Based on Ceramic MEMS Structures Made of Anodic Alumina and Yttria Stabilized Zirconia Films.” IMAPSource Proceedings 2012 (CICMT): 528–34. https://doi.org/10.4071/CICMT-2012-WP33.

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