Vol. 2012, Issue DPC, 2012January 01, 2012 EDT
High-Aspect Ratio Planarization using Self-Leveling Materials
High-Aspect Ratio Planarization using Self-Leveling Materials
Michelle Fowler, Dongshun Bai, Curt Planje, Xie Shao,
Fowler, Michelle, Dongshun Bai, Curt Planje, and Xie Shao. 2012. “High-Aspect Ratio Planarization Using Self-Leveling Materials.” IMAPSource Proceedings 2012 (DPC): 2567–86. https://doi.org/10.4071/2012DPC-tha35.