High-Aspect Ratio Planarization using Self-Leveling Materials

Michelle Fowler; Dongshun Bai; Curt Planje; Xie Shao

doi:10.4071/2012DPC-tha35

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Fowler, Michelle, Dongshun Bai, Curt Planje, and Xie Shao. 2012. “High-Aspect Ratio Planarization Using Self-Leveling Materials.” IMAPSource Proceedings 2012 (DPC): 2567–86. https://doi.org/10.4071/2012DPC-tha35.

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