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Device Packaging Conference Presentations
Vol. 2012, Issue DPC, 2012January 01, 2012 EDT

TGV Microfabrication Technology for 3D Packaging

Shintaro Takahashi, Christian Schmidt, Leander Dittmann, Svend Hoyer, Adrien Chaize, Motoshi Ono, Kenji Kitaoka, Kentaro Tatsukoshi, Shoichi Konishi,
glass interposerhole drilling technologyhigh throughput
https://doi.org/10.4071/2012DPC-tp13
IMAPSource Conference Papers
Takahashi, Shintaro, Christian Schmidt, Leander Dittmann, Svend Hoyer, Adrien Chaize, Motoshi Ono, Kenji Kitaoka, Kentaro Tatsukoshi, and Shoichi Konishi. 2012. “TGV Microfabrication Technology for 3D Packaging.” IMAPSource Proceedings 2012 (DPC): 811–31. https:/​/​doi.org/​10.4071/​2012DPC-tp13.
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