Vol. 2015, Issue DPC, 2015January 01, 2015 EDT
Design and Fabrication of a PCB MEMS Module With Integrated Switches and Sensor Suite
Design and Fabrication of a PCB MEMS Module With Integrated Switches and Sensor Suite
Li-Anne Liew, D. Boteler, C.Y. Lin, N. Marsiglia, Y.C. Lee,
Liew, Li-Anne, D. Boteler, C.Y. Lin, N. Marsiglia, and Y.C. Lee. 2015. “Design and Fabrication of a PCB MEMS Module With Integrated Switches and Sensor Suite.” IMAPSource Proceedings 2015 (DPC): 1070–1122. https://doi.org/10.4071/2015DPC-tp63.