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High Temperature Conference Papers
Vol. 2015, Issue HiTEN, 2015
July 01, 2015 EDT
High-Temperature Trench Capacitors, Using Thin-Film ALD Dielectrics
Dorothee Dietz
,
Yusuf Celik
,
Andreas Goehlich
,
Holger Vogt
,
Holger Kappert
,
High-temperature
Capacitor
ALD
3D-integration
•
https://doi.org/10.4071/HiTEN-Session4-Paper4_2
IMAPSource Conference Papers
Dietz, Dorothee, Yusuf Celik, Andreas Goehlich, Holger Vogt, and Holger Kappert. 2015. “High-Temperature Trench Capacitors, Using Thin-Film ALD Dielectrics.”
IMAPSource Proceedings
2015 (HiTEN): 130–33.
https://doi.org/10.4071/HiTEN-Session4-Paper4_2
.
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