High-Temperature Trench Capacitors, Using Thin-Film ALD Dielectrics

Dorothee Dietz; Yusuf Celik; Andreas Goehlich; Holger Vogt; Holger Kappert

doi:10.4071/HiTEN-Session4-Paper4_2

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Dietz, Dorothee, Yusuf Celik, Andreas Goehlich, Holger Vogt, and Holger Kappert. 2015. “High-Temperature Trench Capacitors, Using Thin-Film ALD Dielectrics.” IMAPSource Proceedings 2015 (HiTEN): 130–33. https://doi.org/10.4071/HiTEN-Session4-Paper4_2.

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