Vol. 2015, Issue HiTEN, 2015July 01, 2015 EDT
High-Temperature Trench Capacitors, Using Thin-Film ALD Dielectrics
High-Temperature Trench Capacitors, Using Thin-Film ALD Dielectrics
Dorothee Dietz, Yusuf Celik, Andreas Goehlich, Holger Vogt, Holger Kappert,
Dietz, Dorothee, Yusuf Celik, Andreas Goehlich, Holger Vogt, and Holger Kappert. 2015. “High-Temperature Trench Capacitors, Using Thin-Film ALD Dielectrics.” IMAPSource Proceedings 2015 (HiTEN): 130–33. https://doi.org/10.4071/HiTEN-Session4-Paper4_2.