Vol. 2011, Issue CICMT, 2011September 01, 2011 EDT
Surface Micro Machined Actuators on Piezoelectric Bulk Material
Surface Micro Machined Actuators on Piezoelectric Bulk Material
Sandy Zaehringer, Elisabeth Widamnn, Norbert Schwesinger,
Zaehringer, Sandy, Elisabeth Widamnn, and Norbert Schwesinger. 2011. “Surface Micro Machined Actuators on Piezoelectric Bulk Material.” IMAPSource Proceedings 2011 (CICMT): 99–104. https://doi.org/10.4071/CICMT-2011-TP22.