Novel Technology Options for Multilayer-Based Ceramic Microsystems

Uwe Partsch; Adrian Goldberg; Martin Ihle; Gunter Hagen; D. Arndt

doi:10.4071/CICMT-2011-WA13

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Partsch, Uwe, Adrian Goldberg, Martin Ihle, Gunter Hagen, and D. Arndt. 2011. “Novel Technology Options for Multilayer-Based Ceramic Microsystems.” IMAPSource Proceedings 2011 (CICMT): 166–71. https://doi.org/10.4071/CICMT-2011-WA13.

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