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Ceramics Conference Papers
Vol. 2011, Issue CICMT, 2011
September 01, 2011 EDT
Novel Technology Options for Multilayer-Based Ceramic Microsystems
Uwe Partsch
,
Adrian Goldberg
,
Martin Ihle
,
Gunter Hagen
,
D. Arndt
,
LTCC
Microsystems
Laser
Micro Punching
Aerosol Printing
•
https://doi.org/10.4071/CICMT-2011-WA13
IMAPSource Conference Papers
Partsch, Uwe, Adrian Goldberg, Martin Ihle, Gunter Hagen, and D. Arndt. 2011. “Novel Technology Options for Multilayer-Based Ceramic Microsystems.”
IMAPSource Proceedings
2011 (CICMT): 166–71.
https://doi.org/10.4071/CICMT-2011-WA13
.
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