Vol. 2011, Issue DPC, 2011January 01, 2011 EDT
Evalulation of Electrodeposited Photoresists for use in the Fabrication of an Optochip Silicon Interposer
Evalulation of Electrodeposited Photoresists for use in the Fabrication of an Optochip Silicon Interposer
Tsang, Cornelia, Janet Okada, and Eric Huenger. 2011. “Evalulation of Electrodeposited Photoresists for Use in the Fabrication of an Optochip Silicon Interposer.” IMAPSource Proceedings 2011 (DPC): 1555–95. https://doi.org/10.4071/2011DPC-wp13.
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