Vol. 2011, Issue DPC, 2011January 01, 2011 EDT
Novel Wet Chemical Copper Metallization for Glass Interposers
Novel Wet Chemical Copper Metallization for Glass Interposers
Simon Bamberg, Ralf Bruening, Johannes Etzkorn, Frank Bruening,
Bamberg, Simon, Ralf Bruening, Johannes Etzkorn, and Frank Bruening. 2011. “Novel Wet Chemical Copper Metallization for Glass Interposers.” IMAPSource Proceedings 2011 (DPC): 1535–54. https://doi.org/10.4071/2011DPC-wp12.