Novel Wet Chemical Copper Metallization for Glass Interposers

Simon Bamberg; Ralf Bruening; Johannes Etzkorn; Frank Bruening

doi:10.4071/2011DPC-wp12

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Bamberg, Simon, Ralf Bruening, Johannes Etzkorn, and Frank Bruening. 2011. “Novel Wet Chemical Copper Metallization for Glass Interposers.” IMAPSource Proceedings 2011 (DPC): 1535–54. https://doi.org/10.4071/2011DPC-wp12.

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