Vol. 2017, Issue DPC, 2017January 01, 2017 EDT
First Demonstration of Fine Line RDL Yield Enhancement using an Innovative Ozone Treatment Process for Panel Fan-out and Interposers
First Demonstration of Fine Line RDL Yield Enhancement using an Innovative Ozone Treatment Process for Panel Fan-out and Interposers
Atul Gupta, Eric Snyder, Christiane Gottschalke, Kevin Wenzel, James Gunn, Hao Lu, Yuya Suzuki, Venky Sundaram, Rao Tummala,
Gupta, Atul, Eric Snyder, Christiane Gottschalke, Kevin Wenzel, James Gunn, Hao Lu, Yuya Suzuki, Venky Sundaram, and Rao Tummala. 2017. “First Demonstration of Fine Line RDL Yield Enhancement Using an Innovative Ozone Treatment Process for Panel Fan-out and Interposers.” IMAPSource Proceedings 2017 (DPC): 1–19. https://doi.org/10.4071/2017DPC-TP1_Presentation2.