Plasmon Rulers for 3D IC Alignment | Published in IMAPSource Proceedings

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IMAPSource Conference Papers

Jiang, Hao, Jasbir N. Patel, and Bozena Kaminska. 2017. “Plasmon Rulers for 3D IC Alignment.” IMAPSource Proceedings 2017 (DPC): 1–20. https://doi.org/10.4071/2017DPC-THA1_Presentation1.

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