Vol. 2017, Issue NOR, 2017July 01, 2017 EDT
Effect of wafer-level silicon cap packaging on BiCMOS embedded RF-MEMS switch performance
Effect of wafer-level silicon cap packaging on BiCMOS embedded RF-MEMS switch performance
Selin Tolunay Wipf, Alexander Göritz, Matthias Wietstruck, Maurizio Cirillo, Christian Wipf, Kai Zoschke, Mehmet Kaynak,
Wipf, Selin Tolunay, Alexander Göritz, Matthias Wietstruck, Maurizio Cirillo, Christian Wipf, Kai Zoschke, and Mehmet Kaynak. 2017. “Effect of Wafer-Level Silicon Cap Packaging on BiCMOS Embedded RF-MEMS Switch Performance.” IMAPSource Proceedings 2017 (NOR): 1–4. https://doi.org/10.4071/2017-NOR-Wipf.