High Heat Resistant Peelable Temporary Bonding Film and New Debonding System with Xe Flash Light Irradiation

Yuta Akasu; Emi Miyazawa; Tetsuya Enomoto; Yasuyuki Oyama; Shogo Sobue; Ryoji Furutani; Yuki Nakamura; Takashi Kawamori

doi:10.4071/2380-4505-2020.1.000302

Akasu, Yuta, Emi Miyazawa, Tetsuya Enomoto, Yasuyuki Oyama, Shogo Sobue, Ryoji Furutani, Yuki Nakamura, and Takashi Kawamori. 2020. “High Heat Resistant Peelable Temporary Bonding Film and New Debonding System with Xe Flash Light Irradiation.” IMAPSource Proceedings 2020 (1): 302–6. https://doi.org/10.4071/2380-4505-2020.1.000302.

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