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Symposium Proceedings
Vol. 2015, Issue 1, 2015October 01, 2015 EDT

A metal oxide adhesion layer prepared with water based coating solution for wet Cu metallization of glass interposer

Zhiming Liu, Sara Hunegnaw, Hailuo Fu, Jun Wang, Tafadzwa Magaya, Michael Merschky, Tobias Bernhard, Aric Shorey, Hobie Yun,
Glass interposermetal oxide adhesion layerwet Cu metallization and TGV
https://doi.org/10.4071/isom-2015-WP21
IMAPSource Conference Papers
Liu, Zhiming, Sara Hunegnaw, Hailuo Fu, Jun Wang, Tafadzwa Magaya, Michael Merschky, Tobias Bernhard, Aric Shorey, and Hobie Yun. 2015. “A Metal Oxide Adhesion Layer Prepared with Water Based Coating Solution for Wet Cu Metallization of Glass Interposer.” IMAPSource Proceedings 2015 (1): 365–69. https:/​/​doi.org/​10.4071/​isom-2015-WP21.
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