Gernhardt, Robert, Friedrich Müller, Markus Woehrmann, Habib Hichri, Karin Hauck, Markus Arendt, and Klaus-Dieter Lang. 2018. “A Comparison of the Cu Electrochemical Migration Behavior between Cu Lines with 5 Um L/S Realized by Conventional Semi Additive Process (SAP) and an Innovative Excimer Laser Damascene Process.”
IMAPSource Proceedings 2018 (1): 140–45.
https://doi.org/10.4071/2380-4505-2018.1.000140.