Silicon Micro-Fabrication Technologies for Micro-Filters

Bivragh Majeed; Wim De Malsche; Lei Zhang; Paolo Fiorini; Deniz Sabuncuoglu Tezcan; Philippe Soussan

doi:10.4071/isom-2010-WA5-Paper1

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Majeed, Bivragh, Wim De Malsche, Lei Zhang, Paolo Fiorini, Deniz Sabuncuoglu Tezcan, and Philippe Soussan. 2010. “Silicon Micro-Fabrication Technologies for Micro-Filters.” IMAPSource Proceedings 2010 (1): 498–504. https://doi.org/10.4071/isom-2010-WA5-Paper1.

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