Silicon Micro-Fabrication Technologies for Micro-Filters

Majeed, Bivragh, Wim De Malsche, Lei Zhang, Paolo Fiorini, Deniz Sabuncuoglu Tezcan, and Philippe Soussan. 2010. “Silicon Micro-Fabrication Technologies for Micro-Filters.” IMAPSource Proceedings 2010 (1): 498–504. https:/​/​doi.org/​10.4071/​isom-2010-WA5-Paper1.