Vol. 2010, Issue 1, 2010January 01, 2010 EDT
Laser Patterning and Via Drilling of Sapphire Wafers and Die
Laser Patterning and Via Drilling of Sapphire Wafers and Die
Vignes, Justin, Fred Haring, Syed Sajid Ahmad, Kaycie Gerstner, and Aaron Reinholz. 2010. “Laser Patterning and Via Drilling of Sapphire Wafers and Die.” IMAPSource Proceedings 2010 (1): 513–20. https://doi.org/10.4071/isom-2010-WA5-Paper3.
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